As semiconductor technology pushes deep into the nanoscale, reliable measurement becomes not just a technical requirement but a conceptual challenge: what it means to measure, resolve, and trust a signal at the limits of instrumentation. This course presents the fundamental principles and practical methods of semiconductor metrology, focusing on widely used characterization tools in device fabrication and process control. Students examine how instruments generate, transform, and report data, with attention to calibration, uncertainty, modeling assumptions, and measurement limits in both in-line and off-line contexts. Emphasis is placed on connecting physical theory, device structure, and real measurement behavior in advanced manufacturing environments.
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